A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems-Reference-Cited by-同舟云学术

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A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems

Published:2003-02 Issue:1 Volume:12 Page:81-92
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:en
Short-container-title:J. Microelectromech. Syst.

Author:

Roberts D.C.,Hanqing Li ,Steyn J.L.,Yaglioglu O.,Spearing S.M.,Schmidt M.A.,Hagood N.W.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/26563/01183745.pdf?arnumber=1183745

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