Funder
Defense Advanced Research Projects Agency-Microsystems Technology Office (DARPA-MTO) Near Zero Power RF and Sensor Operations (NZERO) Program
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Cited by
24 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Microfabricated Aluminum Nitride MEMS Resonator;2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2023-05-14
2. High-Q Resonator–Inductor Using LiNbO₃ Plate for Frequency Tuning in 1–5 GHz;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2022-07
3. Enhanced Airborne Ultrasound WuRx Using Aluminum Nitride 4-Beam pNUTs Arrays;Journal of Microelectromechanical Systems;2022-02
4. RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook;Journal of Micromechanics and Microengineering;2021-09-30
5. Power Flow Angles of GHz Propagating Acoustic Waves in Thin-Film Lithium Niobate;2021 IEEE International Ultrasonics Symposium (IUS);2021-09-11