Thermoelastic Damping in the Electrodes Determines $Q$ of AlN Contour Mode Resonators-Reference-Cited by-同舟云学术

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Thermoelastic Damping in the Electrodes Determines $Q$ of AlN Contour Mode Resonators

Published:2017-06 Issue:3 Volume:26 Page:550-558
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Segovia-Fernandez Jeronimo^ORCID,Piazza Gianluca^ORCID

Funder

DEFYS DARPA

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/7936684/07880592.pdf?arnumber=7880592

Cited by 33 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Noncontact excitation of multi-GHz lithium niobate electromechanical resonators;Microsystems & Nanoengineering;2024-09-05

2. Multipurpose Acoustic Metamaterial Anchors for Aluminum Scandium Nitride Contour Mode Resonators;Journal of Microelectromechanical Systems;2024-08

3. A ScAlN-based piezoelectric breathing mode dual-ring resonator with high temperature stability;Microelectronic Engineering;2024-04

4. Generalized frequency shift and attenuation in simply-supported micro/nano-beam resonators with thermoelastic dissipation;Journal of Thermal Stresses;2024-02-02

5. Ultra-High Q Self-Ovenized AlScN-on-Si X-Lamé Resonator for Stable Clock Generation;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

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