A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion
Author:
Affiliation:
1. Department of Electrical Engineering, École de Technologie Supérieure (ETS), Montreal, QC, Canada
Funder
Natural Sciences and Engineering Research Council of Canada (NSERC), AEPONYX Inc.
PRIMA Québec
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9906516/09834939.pdf?arnumber=9834939
Reference44 articles.
1. Large displacement bi-directional out-of-plane Lorentz actuator array for surface manipulation
2. Piezoelectric micro-lens actuator
3. Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers
4. Nonlinear Multi-Mode Wideband Piezoelectric MEMS Vibration Energy Harvester
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