High-Resolution Capacitive Microinclinometer With Oblique Comb Electrodes Using (110) Silicon-Reference-Cited by-同舟云学术

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High-Resolution Capacitive Microinclinometer With Oblique Comb Electrodes Using (110) Silicon

Published:2011-12 Issue:6 Volume:20 Page:1269-1276
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Jeong Dae-Hun,Yun Sung-Sik,Lee Byung-Geun,Lee Myung-Lae,Choi Chang-Auk,Lee Jong-Hyun

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6075219/06035945.pdf?arnumber=6035945

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization of Sensitivity of Time Domain MEMS Accelerometer;Micromachines;2024-01-31

2. 3D Printing-Assisted Soft Capacitive Inclinometers for Simultaneous Monitoring of Tilt Angles and Directions;IEEE Access;2022

3. Tilt sensor based on a dual‐axis microaccelerometer with maximum sensitivity and minimum uncertainty in the full measurement range;Micro & Nano Letters;2017-11

4. Three-Dimensional Anisotropic Metamaterials as Triaxial Optical Inclinometers;Scientific Reports;2017-06-02

5. High-Resolution MEMS Inclinometer Based on Pull-In Voltage;Journal of Microelectromechanical Systems;2015-08

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