MEMS Tunable Asymmetric Fabry–Perot Cavity for High-Precision Weighing of Macro Samples-Reference-Cited by-同舟云学术

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MEMS Tunable Asymmetric Fabry–Perot Cavity for High-Precision Weighing of Macro Samples

Published:2013-08 Issue:4 Volume:22 Page:884-891
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Poulin Alexandre,St-Gelais Raphael,Eichenberger Ali L.,Thevenaz Luc,Peter Yves-Alain

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/6570756/06481425.pdf?arnumber=6481425

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Transmission-enabled fiber Fabry–Perot cavity based on a deeply etched slotted micromirror;Applied Optics;2018-05-30

2. Exploitation of semi‐sequential reactive ion etch processes to fabricate in‐plane Si structures;Micro & Nano Letters;2018-04

3. High-Speed Control of Electromechanical Transduction: Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors;IEEE Control Systems;2016-10

4. Monolithic silicon-micromachined free-space optical interferometers onchip;Laser & Photonics Reviews;2014-11-05

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