An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum-Reference-Cited by-同舟云学术

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An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum

Published:2020-06 Issue:3 Volume:29 Page:387-396
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Gama Gabriel R. de S.^ORCID,Coelho Claudia A. A.^ORCID,Gaspar Joao,Freitas Paulo J. P.,Sommer Rubem L.,Mello Alexandre^ORCID

Funder

CBPF/MCTIC-INL Program

CNPq, CAPES, FAPERJ, and FINEP

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9106588/09042299.pdf?arnumber=9042299

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimal design of electro-thermo-mechanical microactuators considering minimum length scale constraints;Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science;2024-07-26

2. Uncertainty quantification with high-dimensional correlated process variations for an in-situ thermal expansion coefficient test structure;Sensors and Actuators A: Physical;2024-06

3. Crossover/Veering in V-Shaped MEMS Resonators;Journal of Microelectromechanical Systems;2022-02

4. Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces;Advanced Intelligent Systems;2021-07-11

5. Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch;Journal of Micromechanics and Microengineering;2021-02-11

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