Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring-Reference-Cited by-同舟云学术

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Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring

Published:2021-06 Issue:3 Volume:30 Page:340-342
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Garg Manu^ORCID,Arya Dhairya S.^ORCID,Sharma Sumit^ORCID,Kumar Sushil,Uddin Wasi^ORCID,Das Samaresh,Chiu Yi^ORCID,Singh Pushpapraj^ORCID

Funder

IMPRINT, MHRD

Nanoscale Research Facility (NRF) and Central Research Facility (CRF) at Indian Institute of Technology, New Delhi, India

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9444912/09411512.pdf?arnumber=9411512

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrothermal analysis of a simple MEMS Pirani Gauge with a lower detection limit;2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM);2024-03-03

2. Nanogap CMOS-MEMS Pirani Gauge Based on Titanium-Nitride Heating Element for Broad-Range Vacuum Characterization;IEEE Transactions on Electron Devices;2024-02

3. Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range;Journal of Micromechanics and Microengineering;2024-01-12

4. Ultrasensitive Reduced Vanadium Dioxide-Based MEMS Pirani Gauge with Extended Dynamic Range;Springer Proceedings in Physics;2024

5. Low-Pressure Thermal Sensor Based on Porous Anodic Aluminum Oxide;Nanobiotechnology Reports;2023-12

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