Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges
Author:
Affiliation:
1. Institute of Technological Sciences, Wuhan University, Wuhan, China
Funder
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9906516/09834051.pdf?arnumber=9834051
Reference16 articles.
1. Thermo-acoustic engineering of silicon microresonators via evanescent waves
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4. Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness
5. Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit Bonding
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