Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode-Reference-Cited by-同舟云学术

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Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

Published:2014-02 Issue:1 Volume:23 Page:78-91
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Lin Chih-Ming,Yantchev Ventsislav,Zou Jie,Chen Yung-Yu,Pisano Albert P.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/6729039/06678085.pdf?arnumber=6678085

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