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Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope

  • Published:2021-12 Issue:6 Volume:30 Page:836-842
  • ISSN:1057-7157
  • Container-title:Journal of Microelectromechanical Systems
  • language:
  • Short-container-title:J. Microelectromech. Syst.

Author:

Parajuli MadanORCID,Sobreviela Guillermo,Pandit MilindORCID,Zhang HeminORCID,Seshia Ashwin A.ORCID

Funder

Engineering and Physical Research Council U.K., through the National Research Facility for Infrastructure Sensing

Silicon Microgravity

Innovate U.K., through the Technology Strategy Board

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhancement of Frequency and Amplitude Stability in A Bulk Acoustic Wave Resonator Based on Amplitude Saturation;2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2024-03-25

2. Closed-Loop Operation of a High-Q Silicon MEMS Quatrefoil Suspension Gyroscope;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

3. A Silicon MEMS Quatrefoil Suspension Gyroscope;Journal of Microelectromechanical Systems;2023-10

4. Milli-Hertz Frequency Tuning Architecture Toward High Repeatable Micromachined Axi-Symmetry Gyroscopes;IEEE Transactions on Industrial Electronics;2023-06

5. Frequency Modulated Operation in a Silicon MEMS Gyroscope with Quatrefoil Suspension System;2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2022-05-08
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