Micro-Raman measurement of bending stresses in micromachined silicon flexures-Reference-Cited by-同舟云学术

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Micro-Raman measurement of bending stresses in micromachined silicon flexures

Published:2003-12 Issue:6 Volume:12 Page:779-787
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:en
Short-container-title:J. Microelectromech. Syst.

Author:

Srikar V.T.,Swan A.K.,Unlu M.S.,Goldberg B.B.,Spearing S.M.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/28121/01257355.pdf?arnumber=1257355

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