Comparison of Au and Au–Ni Alloys as Contact Materials for MEMS Switches-Reference-Cited by-同舟云学术

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Comparison of Au and Au–Ni Alloys as Contact Materials for MEMS Switches

Published:2009-04 Issue:2 Volume:18 Page:287-295
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Zhenyin Yang ,Lichtenwalner D.J.,Morris A.S.,Krim J.,Kingon A.I.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/4808224/04770198.pdf?arnumber=4770198

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