High-Fidelity Modeling of MEMS Resonators—Part II: Coupled Beam-Substrate Dynamics and Validation

Author:

Park Y.-H.,Park K.C.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array Reflectors;Micromachines;2023-10-31

2. An analysis for support loss of micro-cantilever beam based on PML method;Vibroengineering Procedia;2023-10-20

3. Computational Modeling Challenges;Microsystems and Nanosystems;2017

4. Damping in Resonant MEMS;Advanced Micro and Nanosystems;2015-08-21

5. Review and comparison of different support loss models for micro-electro-mechanical systems resonators undergoing in-plane vibration;Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science;2011-09-14

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