Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators-Reference-Cited by-同舟云学术

Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators

Published:2022-06 Issue:3 Volume:31 Page:318-327
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Chen Wen¹,Jia Wenhan¹,Xiao Yuhao¹^ORCID,Wu Guoqiang¹^ORCID

Affiliation:

1. Institute of Technological Sciences, Wuhan University, Wuhan, China

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9785947/09741848.pdf?arnumber=9741848

Reference28 articles.

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5. Doping-Induced Temperature Compensation of Thermally Actuated High-Frequency Silicon Micromechanical Resonators

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