Auto-Bias Electrical Variable Capacitor of Reduced Active Component Count and Voltage Stress for 13.56 MHz RF Plasma Process
Author:
Affiliation:
1. Department of Electrical Engineering, Jeonbuk National University, Jeonju-si, Korea
Funder
National Research Foundation of Korea
Korea government
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx7/28/9832711/09775201.pdf?arnumber=9775201
Reference25 articles.
1. Multistage Complex-Impedance Matching Network Analysis and Optimization
2. Cooper-Pair Box as a Variable Capacitor
3. Widely Tunable Variable Capacitor With Switching and Latching Mechanisms
4. High Aspect Ratio Vertical Cantilever RF-MEMS Variable Capacitor
5. A Solid State Variable Capacitor With Minimum Capacitor
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1. A New High-Power Density Tailored Waveform Modulator for Plasma Processing;IEEE Transactions on Industrial Electronics;2024-11
2. Resonance Type Electrical Variable Capacitor with Reduced Active Devices Loss for 13.56 MHz RF Plasma System;2024 IEEE 10th International Power Electronics and Motion Control Conference (IPEMC2024-ECCE Asia);2024-05-17
3. Optimal Impedance Design for Dual-Branch High-Frequency Inverter Based on Active Regulation and Passive Projection;IEEE Transactions on Power Electronics;2023-09
4. Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56MHz RF Plasma System;2023 11th International Conference on Power Electronics and ECCE Asia (ICPE 2023 - ECCE Asia);2023-05-22
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