Towards predictive system-level modelling of miniaturized photoacoustic gas sensors

Author:

Essing Simon1,Schrag Gabriele1,Tumpold David2,Glacer Christoph2,Mihotek Michael2,Kravchenko Andrey3

Affiliation:

1. Chair of Physics of Electrotechnology, Technical University of Munich,Germany

2. Infineon Technologies AG,Neubiberg,Germany

3. Infineon Technologies Dresden GmbH,Dresden,Germany

Publisher

IEEE

Reference12 articles.

1. Blackbody Infrared Emitter for Photo Acoustic Gas Sensors;lodha;Master Thesis Lehrstuhl für technische Elektrophysik,2015

2. Non-Dispersive Infrared Gas Sensing Technology: A Review;jha;IEEE Sensors J,2021

3. The HITRAN2016 molecular spectroscopic database

4. Linepak: Algorithms for modeling spectral transmittance and radiance

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1. Miniaturized two-chamber photoacoustic CO2 sensor with a wafer-bonded MEMS (micro-electro-mechanical systems) detector;Journal of Sensors and Sensor Systems;2024-08-02

2. Design and Implementation of a Miniaturized Photoacoustic Spectroscopy CO₂ Sensor;IEEE Transactions on Instrumentation and Measurement;2024

3. Predictive Modelling of Emitter Systems in Photoacoustic Gas Sensing;2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP);2023-05-28

4. Humidity Sensing for free—advanced thermoacoustic signal models in miniaturized photoacoustic gas sensors;2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2023-04-17

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