Yield prediction in semiconductor manufacturing using an AI-based cascading classification system
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9200885/9208231/09208250.pdf?arnumber=9208250
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Pioneering Excellence in Semiconductor Manufacturing via XGBoost with BAT Optimization for Cutting-Edge Predictive Maintenance;2024 IEEE International Conference on Big Data & Machine Learning (ICBDML);2024-02-24
2. Using the Test Guardband Estimation Method to Forecast Future Semiconductor Yield Trends;IETE Journal of Research;2024-02
3. Industry 5.0: Research Areas and Challenges With Artificial Intelligence and Human Acceptance;IEEE Industrial Electronics Magazine;2024
4. Wafer yield prediction using AI: potentials and pitfalls;Metrology, Inspection, and Process Control XXXVII;2023-04-27
5. Data Additive Residual Learning based Yield Prediction for Semiconductor Manufacturing;2023 IEEE 39th International Conference on Data Engineering (ICDE);2023-04
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