Design and Simulation Analysis of Different Diaphragm Shapes for Piezoresistive Pressure Sensor
Author:
Affiliation:
1. Andhra University,College of Engg,Department of Instrument Technology,Visakhapatnam,India
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10037246/10037222/10037695.pdf?arnumber=10037695
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4. Integrated piezoresistive pressure sensor with both voltage and frequency output
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