A Study of Test Throughput Analysis on Capacitance Measurement of Parallel Test Structures Using LCR and Direct Charge based Instruments-Reference-Cited by-同舟云学术

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A Study of Test Throughput Analysis on Capacitance Measurement of Parallel Test Structures Using LCR and Direct Charge based Instruments

Published:2019-03 Issue: Volume: Page:
ISSN:
Container-title:2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)
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Author:

Katragadda Veenadhar,Deshmukh Namita,Gasasira Arthur,Lee Cheng-Mao,Cusick Alan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8726168/8730915/08730979.pdf?arnumber=8730979

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Issues and advances in rapid Quasi-Static CV for high throughput semiconductor process monitoring;2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS);2022-03-21

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