Investigation of Piezoelectricity and Curie Temperature of Pb(Mg1/3, Nb2/3)O3–PbTiO3 Epitaxial Thin Film on Si Prepared by Sputter Deposition With Fast Cooling-Reference-Cited by-同舟云学术

Investigation of Piezoelectricity and Curie Temperature of Pb(Mg1/3, Nb2/3)O3–PbTiO3 Epitaxial Thin Film on Si Prepared by Sputter Deposition With Fast Cooling

Published:2018-09 Issue:9 Volume:65 Page:1695-1702
ISSN:0885-3010
Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
language:
Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Yoshida Shinya^ORCID,Morimura Takumi^ORCID,Wasa Kiyotaka,Tanaka Shuji

Funder

JSPS KAKENHI

Asahi Glass Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/58/8452191/08385124.pdf?arnumber=8385124

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3. Sputter Deposition and Characterization of Sm-Doped Pb(Mg_1/3, Nb_2/3)O₃–PbTiO₃ Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2022-05

4. Sputter deposition and characterization of “epi-poly” Pb(Zr, Ti)O3 thin film on (100) Si substrate for MEMS applications;Japanese Journal of Applied Physics;2021-09-24

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