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Development of Sputter Epitaxy Technique of Pure-Perovskite (001)/(100)-Oriented Sm-Doped Pb(Mg1/3, Nb2/3)O3–PbTiO3 on Si

  • Published:2020-12 Issue:12 Volume:67 Page:2738-2744
  • ISSN:0885-3010
  • Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
  • language:
  • Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Qi XuanmengORCID,Yoshida ShinyaORCID,Tanaka ShujiORCID

Funder

Japan Society for the Promotion of Science (JSPS) KAKENHI

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking;Journal of Micromechanics and Microengineering;2024-02-14

2. Epitaxial SM-Doped PMN-Pt Film with High Piezoelectric Constant for MEMS Application;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

3. MEMS Using Epitaxial PZT Family;2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF);2023-07-23

4. Sputter Deposition and Characterization of Sm-Doped Pb(Mg1/3, Nb2/3)O₃–PbTiO₃ Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2022-05

5. Sputter deposition and characterization of “epi-poly” Pb(Zr, Ti)O3 thin film on (100) Si substrate for MEMS applications;Japanese Journal of Applied Physics;2021-09-24
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