Reducing anchor loss in micromechanical extensional mode resonators-Reference-Cited by-同舟云学术

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Reducing anchor loss in micromechanical extensional mode resonators

Published:2010-02 Issue:2 Volume:57 Page:448-454
ISSN:0885-3010
Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
language:
Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Tas V.,Olcum S.,Aksoy M.,Atalar A.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/58/5417179/05417204.pdf?arnumber=5417204

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3. Side-Supported Radial-Mode Thin-Film Piezoelectric-on-Silicon Disk Resonators;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2019-04

4. Anchor Loss Calculation for Ring Shape Anchored Contour Mode Disk Resonators;The International Journal of Acoustics and Vibration;2018-09

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