1. Laboratory of Measurement and Sensor System Techniques, Faculty of Electrical Engineering and Information Technology, Dresden University of Technology, Dresden, Germany
2. Department of Medical Engineering, Fraunhofer Institute for Machine Tools and Forming Technology IWU, Chemnitz, Germany
3. Department of Microsystems and Fluid Mechanics, ZBT GmbH Zentrum für BrennstoffzellenTechnik, Duisburg, Germany