Sub-10nm Ultra-thin ZnO Channel FET with Record-High 561 µA/µm ION at VDS 1V, High µ-84 cm2/V-s and1T-1RRAM Memory Cell Demonstration Memory Implications for Energy-Efficient Deep-Learning Computing-Reference-Cited by-同舟云学术

Sub-10nm Ultra-thin ZnO Channel FET with Record-High 561 µA/µm I_ON at V_DS 1V, High µ-84 cm²/V-s and1T-1RRAM Memory Cell Demonstration Memory Implications for Energy-Efficient Deep-Learning Computing

Published:2022-06-12 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
language:
Short-container-title:

Author:

Chand Umesh¹,Sabry Aly Mohamed M.²,Lal Manohar¹,Chun-Kuei Chen¹,Hooda Sonu¹,Tsai Shih-Hao¹,Fang Zihang¹,Veluri Hasita¹,Voon-Yew Thean Aaron¹

Affiliation:

1. National University of Singapore (NUS),Singapore

2. Nanyang Technological University (NTU),Singapore

Funder

National Research Foundation

National University of Singapore

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9830116/9830138/09830250.pdf?arnumber=9830250

Reference13 articles.

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Review of Material Properties of Oxide Semiconductor Thin Films Grown by Atomic Layer Deposition for Next-Generation 3D Dynamic Random-Access Memory Devices;Chemistry of Materials;2024-02-26

2. Extremely High-κ Hf_0.2Zr_0.8O₂ Gate Stacks Integrated Into Eight Stacked Ge_0.95Si_0.05 Nanowires and Nanosheets nFETs to Boost I_ON;IEEE Transactions on Electron Devices;2023-12

3. ProtFe: Low-Cost Secure Power Side-Channel Protection for General and Custom FeFET-Based Memories;ACM Transactions on Design Automation of Electronic Systems;2023-11-15

4. Highly Stable Short Channel Ultrathin Atomic Layer Deposited Indium Zinc Oxide Thin Film Transistors With Excellent Electrical Characteristics;IEEE Electron Device Letters;2023-10

5. CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor;Nature Communications;2023-09-28