A surface micromachined capacitive pressure sensor for biomedical applications

Author:

Babbitt K.E.,Fuller L.,Keller B.

Publisher

IEEE

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Biomedical Sensors and Their Interfacing;Advanced Interfacing Techniques for Sensors;2017

2. Pressure and Force Transducers;Principles of Measurement and Transduction of Biomedical Variables;2015

3. Smooth Contact Capacitive Pressure Sensors in Touch- and Peeling-Mode Operation;IEEE Sensors Journal;2009-03

4. Simultaneous actuation and displacement sensing for electrostatic drives;Journal of Micromechanics and Microengineering;2008-01-24

5. Fabrication of SiC MEMS Pressure Sensor Based on Novel Vacuum-Sealed Method;2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems;2008-01-01

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