Affiliation:
1. State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
Funder
National Natural Science Foundation of China
Youth Innovation Promotion Association, Chinese Academy of Sciences
National Key Research and Development Program of China
Strategic Priority Research Program of CAS
Science and Technology Council of Shanghai
Autonomous Deployment Project of the State Key Laboratory of Materials for Integrated Circuits
Publisher
Institute of Electrical and Electronics Engineers (IEEE)