Deposition of superhard amorphous carbon films by pulsed arc sources
Author:
Affiliation:
1. Fraunhofer-Inst. fur Werkstoff- und Strahltech., Dresden, Germany
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Condensed Matter Physics,Nuclear and High Energy Physics
Link
http://xplorestaging.ieee.org/ielx3/27/13810/00640686.pdf?arnumber=640686
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