Author:
Thornell G.,Rapp H.,Hjort K.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation
Cited by
14 articles.
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1. Optimum reactive ion etching ofx-cut quartz using SF6and Ar;Journal of Micromechanics and Microengineering;2013-09-27
2. Heavy ion beam micromachining on LiNbO3;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-01
3. Development of SMD 32.768 kHz tuning fork-type crystals;International Journal of Materials Research;2008-11-01
4. Ion track enabled multiple wire microvia interconnects in printed circuit boards;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2008-04
5. Development of SMD 32.768 kHz tuning fork type crystals;International Journal of Materials Research;2007-03-01