Numerical simulation study on the effect of supercritical carbon dioxide on particles in the microchannel slip zone

Author:

Zhao Na1,Jiao Shenli1,Xing Haixiao1,Cheng Youliang1,Wang Wenyang1

Affiliation:

1. North China Electric Power University,Department ofPower Engineering,Baoding,China,071000

Funder

Fundamental Research Funds for the Central Universities

Publisher

IEEE

Reference31 articles.

1. Damage-Free Cleaning Technology with Supercritical CO2;wang;Micro-electronics Technology,2010

2. Supercritical cleaning method for MEMS, semiconductor and porecision machinery;zhang;Clean World 'll,2007

3. Supercritical CO2 Cleaning of Carbonaceous Deposits on Diesel Engine Valve

4. Principle analysis of carbon dioxide cleaning technology;wei;Cleaning World,2014

5. Removal of Small Particles from a Porous Material by Ultrasonic Irradiation

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