Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films-Reference-Cited by-同舟云学术

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Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films

Published:2023-10-22 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE Nanotechnology Materials and Devices Conference (NMDC)
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Author:

Nazib Sami A.¹,Reymatias Mark V.¹,Hutchins-Delgado Troy A.¹,Gharde Shruti I.¹,Sommer Erika M.¹,Jamil Erum¹,Smolyakov Gennady A.¹,Lu Tzu-Ming²,Ivanov Sergei A.³,Komissarov Ivan⁴,Sobolewski Roman⁴,Osiński Marek¹

Affiliation:

1. University of New Mexico,Center For High Technology Materials,Albuquerque,NM,USA

2. Center for Integrated Nanotechnologies Sandia National Laboratories,Albuquerque,NM,USA

3. Center for Integrated Nanotechnologies Los Alamos National Laboratory,Albuquerque,NM,USA

4. University of Rochester,Dept. of Electrical and Computer Engineering,Rochester,Ny,USA

Funder

National Science Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10343386/10343419/10343963.pdf?arnumber=10343963

Reference6 articles.

1. High optical efficiency and photon noise limited sensitivity of microwave kinetic inductance detectors using phase readout

2. Low-noise 0.8-0.96- and 0.96-1.12-THz superconductor-insulator-superconductor mixers for the herschel space observatory

3. Fabrication of NbTiN/Al–AlNX/NbTiN Josephson Junctions for Superconducting Circuits Operating Around 10 K

4. Superconducting nanowire single-photon detectors: A perspective on evolution, state-of-the-art, future developments, and applications

5. Characterization of surface oxidation layers on ultrathin NbTiN films

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