Low thermal budget PBTI and NBTI reliability solutions for multi-Vth CMOS RMG stacks based on atomic oxygen and hydrogen treatments
Author:
Franco J.1,
Arimura H.1,
De Marneffe J.-F.1,
Claes D.1,
Brus S.1,
Vandooren A.1,
Litta E. Dentoni1,
Horiguchi N.1,
Croes K.1,
Kaczer B.1
Cited by
4 articles.
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