Modal Wavefront Reconstruction in Rotational Shearing Interferometer by Zernike Polynomials-Reference-Cited by-同舟云学术

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Modal Wavefront Reconstruction in Rotational Shearing Interferometer by Zernike Polynomials

Published:2024-10-01 Issue:19 Volume:36 Page:1185-1188
ISSN:1041-1135
Container-title:IEEE Photonics Technology Letters
language:
Short-container-title:IEEE Photon. Technol. Lett.

Author:

Vu TienDung¹^ORCID,Vu Huy²^ORCID

Affiliation:

1. Precision Engineering & Smart Measurements Laboratory, School of Mechanical Engineering, Hanoi University of Science and Technology, Hanoi, Vietnam

2. Department of Mechanical System Design Engineering, Precision Optical Metrology Laboratory, Seoul National University of Science and Technology, Seoul, South Korea

Funder

National Research Foundation with the Government, Ministry of Science and ICT

Fanout Semiconductor PR Pattern High-Speed Automatic Inspection Equipment Development

Ministry of Trade, Industry and Energy’s Mechanical Equipment Industrial Technology Development Project

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/68/10669188/10646378.pdf?arnumber=10646378

Reference20 articles.

1. Practical retrace error correction in non-null aspheric testing: A comparison;Shi;Opt. Commun.,2017

2. Sub-Nyquist interferometry;Greivenkamp;Appl. Opt.,1987

3. Correlated errors in phase-shifting laser Fizeau interferometry;de Groot;Appl. Opt.,2014

4. Optical Shop Testing

5. Improved iterative method for wavefront reconstruction from derivatives in grid geometry;Nguyen;Curr. Opt. Photon.,2022

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