1. Department of Microelectronics and Integrated Circuit, School of Electronic Science and Engineering, Laboratory of Micro/Nano-Optoelectronics, Xiamen University, Xiamen, China
2. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China
3. Department of Microelectronics and Integrated Circuits, Laboratory of Micro/Nano-Optoelectronics, Xiamen University, Xiamen, China