Robust design window determination for metal capacitors upon plasma damage-Reference-Cited by-同舟云学术

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Robust design window determination for metal capacitors upon plasma damage

Published:2014-10 Issue: Volume: Page:
ISSN:
Container-title:2014 IEEE International Integrated Reliability Workshop Final Report (IIRW)
language:
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Author:

Chu T. P.,Tan K. H.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/7041331/7049485/07049534.pdf?arnumber=7049534

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