A machine condition transfer function approach to run-to-run and machine-to-machine reproducibility of III-V compound semiconductor molecular beam epitaxial growth
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Published:1999
Issue:1
Volume:12
Page:66-75
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ISSN:0894-6507
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Container-title:IEEE Transactions on Semiconductor Manufacturing
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language:
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Short-container-title:IEEE Trans. Semicond. Manufact.
Author:
Wang C.,Chen P.,Madhukar A.,Khan T.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials