Solderable Multisided Metal Patterns Enables 3D Integrable Direct Laser Written Polymer MEMS
Author:
Affiliation:
1. Cornell University,The SonicMEMS Laboratory, School of Electrical and Computer Engineering,Ithaca,NY,USA
Funder
National Science Foundation
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10094038/10094053/10094101.pdf?arnumber=10094101
Reference39 articles.
1. Magnetic Helical Micromachines: Fabrication, Controlled Swimming, and Cargo Transport
2. A Process to Realize Direct Laser Written Electrostatic Actuator Elements in a Closed Microcavity
3. 3D Printing Metals At the Microscale: Electroplating Pyrolyzed Carbon Mems
4. Creating three-dimensional magnetic functional microdevices via molding-integrated direct laser writing
5. Shape-programmed 3D printed swimming microtori for the transport of passive and active agents
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