Co-Optimization of Circuits, Layout and Lithography for Predictive Technology Scaling Beyond Gratings

Author:

Jhaveri Tejas,Rovner Vyacheslav,Liebmann Lars,Pileggi Larry,Strojwas Andrzej J.,Hibbeler Jason D.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Graphics and Computer-Aided Design,Software

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