Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review-Reference-Cited by-同舟云学术

Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review

Author:

Ngo Anh Tuan¹,Dey Bappaditya¹^ORCID,Halder Sandip¹^ORCID,De Gendt Stefan²^ORCID,Wang Changhai³^ORCID

Affiliation:

1. Advanced Patterning Department, imec, Leuven, Belgium

2. Department of Materials Engineering and Department of Chemistry, KU Leuven, Leuven, Belgium

3. Institute of Sensors, Signals and Systems, School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh, U.K.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

Reference69 articles.

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2. Machine learning (ML)-guided OPC using basis functions of polar Fourier transform;choi;Proc SPIE,2016

3. An efficient rule-based OPC approach using a DRC tool for 0.18 /spl mu/m ASIC;park;Proc IEEE 1st Int Symp Qual Electron Des,2000

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