Optimal Feature Selection for Defect Classification in Semiconductor Wafers-Reference-Cited by-同舟云学术

Optimal Feature Selection for Defect Classification in Semiconductor Wafers

Published:2022-05 Issue:2 Volume:35 Page:324-331
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Gomez-Sirvent Jose L.¹^ORCID,de la Rosa Francisco Lopez¹,Sanchez-Reolid Roberto²,Fernandez-Caballero Antonio²^ORCID,Morales Rafael³^ORCID

Affiliation:

1. Instituto de Investigación en Informática de Albacete, Universidad de Castilla-La Mancha, Albacete, Spain

2. Instituto de Investigación en Informática de Albacete and the Departamento de Sistemas Informáticos, Universidad de Castilla-La Mancha, Albacete, Spain

3. Instituto de Investigación en Informática de Albacete and the Departamento de Ingeniería Eléctrica, Electrénica, Automática y Comunicaciones, Universidad de Castilla-La Mancha, Albacete, Spain

Funder

iRel40, a European Co-Funded Innovation Project

ECSEL Joint Undertaking

Horizon 2020 Research Programme and participating countries

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/66/9768876/09693988.pdf?arnumber=9693988

Reference48 articles.

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