Mechanical properties of MEMS materials-Reference-Cited by-同舟云学术

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Mechanical properties of MEMS materials

Published: Issue: Volume: Page:
ISSN:
Container-title:2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)
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Author:

Sharpe W.N.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/7731/21224/00984532.pdf?arnumber=984532

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Capture the early stage of shear banding for bulk metallic glass sheet for MEMS applications;Measurement;2022-10

2. Patterned synthesis of nanowires in microheaters: design and operational aspects;Microfluidics and Nanofluidics;2021-12-07

3. Nonlinear behavior of a vibrating axially moving small‐size beam under an electrostatic force;ZAMM - Journal of Applied Mathematics and Mechanics / Zeitschrift für Angewandte Mathematik und Mechanik;2020-06-05

4. Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope;Sensors;2020-05-15

5. Gate Failure Physics of SiC MOSFETs Under Short-Circuit Stress;IEEE Electron Device Letters;2020-01

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