MEMS-based gray-scale lithography-Reference-Cited by-同舟云学术

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MEMS-based gray-scale lithography

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Container-title:2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)
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Author:

Waits C.M.,Ghodssi R.,Ervin M.H.,Dubey M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/7731/21224/00984470.pdf?arnumber=984470

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Designing with Light: Advanced 2D, 3D, and 4D Materials;Advanced Materials;2019-12

4. Emerging Trends in Polymerization-Induced Self-Assembly;ACS Macro Letters;2019-08-07

5. Production of Materials with Spatially-Controlled Cross-Link Density via Vat Photopolymerization;ACS Applied Materials & Interfaces;2016-10-11

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