Modeling and calibration of a capacitive threshold sensor for in situ calibration of MEMS gyroscope-Reference-Cited by-同舟云学术

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Modeling and calibration of a capacitive threshold sensor for in situ calibration of MEMS gyroscope

Published:2016-07 Issue: Volume: Page:
ISSN:
Container-title:2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM)
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Author:

Chen Yi,Aktakka Ethem Erkan,Woo Jong-Kwan,Oldham Kenn Richard

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/7568655/7576733/07576900.pdf?arnumber=7576900

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A High-Resolution Optical Displacement Detection Method for Piezoelectric Microvibratory Stage;IEEE Transactions on Industrial Electronics;2020-12

2. Improved MEMS piezoelectric vibratory stage with reduced off-axis error;Journal of Micro/Nanolithography, MEMS, and MOEMS;2020-02-21

3. A threshold gyroscope based on a bistable mechanism;Mechatronics;2019-11

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