Nanoscale X-Ray Tomography of Integrated Circuits Using a Hybrid Electron/X-Ray Microscope: Results and Prospects-Reference-Cited by-同舟云学术

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Nanoscale X-Ray Tomography of Integrated Circuits Using a Hybrid Electron/X-Ray Microscope: Results and Prospects

Published:2023-10-24 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE Physical Assurance and Inspection of Electronics (PAINE)
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Author:

Nakamura Nathan¹^ORCID,Szypryt Paul¹^ORCID,Fowler Joseph W.¹^ORCID,Levine Zachary H.²^ORCID,Swetz Daniel S.³^ORCID

Affiliation:

1. University of Colorado Boulder,Department of Physics,Boulder,Colorado

2. National Institute of Standards and Technology,Quantum Optics Group,Gaithersburg,Maryland

3. National Institute of Standards and Technology,Quantum Sensors Group,Boulder,Colorado

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10317939/10317942/10318004.pdf?arnumber=10318004

Reference36 articles.

1. Chemical mechanical polishing: Theory and experiment

2. Observation of iron spin-states using tabletop x-ray emission spectroscopy and microcalorimeter sensors;joe;Journal of Physics B Atomic Molecular and Optical Physics,2015

3. In situ mapping of chemical segregation using synchrotron x-ray imaging

4. Valence‐to‐core X‐ray emission spectroscopy of titanium compounds using energy dispersive detectors

5. PENEPMA: A Monte Carlo Program for the Simulation of X-Ray Emission in Electron Probe Microanalysis

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