Selective Laser-induced Etching of Borosilicate Glass In Hydrofluoric Acid
Author:
Affiliation:
1. Southeast University,School of Microelectronics,Wuxi,China
2. Southeast University,School of Microelectronics,Nanjing,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10491594/10491891/10492430.pdf?arnumber=10492430
Reference19 articles.
1. Development of Through Glass Via Technology;Chen;Electronics & Packaging,2021
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3. High-g MEMS shock threshold sensor integrated on a copper filling through-glass-via (TGV) substrate for surface mount application
4. Effect of sandblasting on the surface roughness and residual stress of 3Y-TZP (zirconia)
5. Sandblasting parameter variation effect on galvanized steel surface chemical composition, roughness and free energy
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