Author:
Baez Alvarez Carlos Ramon,Linares Aranda Monico,Torres Jacome Alfonso,Calleja Arriaga Wilfrido,de la Hidalga Wade Javier
Cited by
1 articles.
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1. Process Control Monitoring Devices for CMOS-MEMS Monolithic PMUT Technology;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21