1. Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
2. Institute of Microelectronics and the Key Laboratory of Science and Technology on Silicon Devices, Chinese Academy of Sciences, Beijing, China
3. Power Semiconductor and Integrated Circuit Laboratory, College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing, China
4. Institute of Semiconductors, Guangdong Academy of Sciences, Guangzhou, China