A Model for Wafer Fabrication Dynamics in Integrated Circuit Manufacturing-Reference-Cited by-同舟云学术

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A Model for Wafer Fabrication Dynamics in Integrated Circuit Manufacturing

Published:1987-01 Issue:1 Volume:17 Page:91-100
ISSN:0018-9472
Container-title:IEEE Transactions on Systems, Man, and Cybernetics
language:
Short-container-title:IEEE Trans. Syst., Man, Cybern.

Author:

Dayhoff Judith,Atherton Robert

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

General Engineering

Link

http://xplorestaging.ieee.org/ielx5/21/4075646/04075658.pdf?arnumber=4075658

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