Antimony Semimetal Contact with Enhanced Thermal Stability for High Performance 2D Electronics-Reference-Cited by-同舟云学术

Antimony Semimetal Contact with Enhanced Thermal Stability for High Performance 2D Electronics

Published:2021-12-11 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE International Electron Devices Meeting (IEDM)
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Author:

Chou Ang-Sheng¹,Wu Tong²,Cheng Chao-Ching¹,Zhan Shun-Siang³,Ni I-Chih³,Wang Shih-Yun⁴,Chang Yu-Chen⁴,Liew San-Lin⁵,Chen Edward¹,Chang Wen-Hao⁴,Wu Chih-I³,Cai Jin⁶,Wong H.-S. Philip¹,Wang Han²

Affiliation:

1. Corporate Research, TSMC,Hsinchu,Taiwan

2. Corporate Research, TSMC,San Jose,CA,USA

3. Graduate Institute of Photonics and Optoelectronics, National Taiwan University,Taipei,Taiwan

4. National Yang Ming Chiao Tung University,Department of Electrophysics,Hsinchu,Taiwan

5. Quality & Reliability, TSMC,Hsinchu,Taiwan

6. Pathfinding, TSMC,Hsinchu,Taiwan

Funder

Ministry of Science and Technology

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9720433/9720494/09720608.pdf?arnumber=9720608

Reference7 articles.

1. Thermal Expansion Coefficient of Monolayer Molybdenum Disulfide Using Micro-Raman Spectroscopy

2. Tunable phase stability and contact resistance of monolayer transition metal dichalcogenides contacts with metal

3. A topological Dirac insulator in a quantum spin Hall phase

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