3D SoC integration, beyond 2.5D chiplets

Author:

Beyne Eric1,Milojevic Dragomir1,Van der Plas Geert1,Beyer Gerald1

Affiliation:

1. imec,Leuven,Belgium

Publisher

IEEE

Reference14 articles.

1. Design Enablement of Fine Pitch Face-to-Face 3D System Integration using Die-by-Die Place & Route

2. Novel Cu/SiCN surface topography control for 1 μm pitch hybrid wafer-to-wafer bonding

3. MemPool: A Shared-L1 Memory Many-Core Cluster with a Low-Latency Interconnect;calvacante;DATE2021,0

4. The 3-D Interconnect Technology Landscape

5. Heterogeneous System Partitioning and the 3D Interconnect Technology Landscape;beyne;2020 Symposia on VLSI technology and Circuits Short course SC2–2,0

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2. Low-Temperature Area-Selective Metal Passivation Bonding Platform for Heterogeneous Integration;IEEE Electron Device Letters;2024-07

3. Low Temperature Cu/SiO2 Hybrid Bonding with Protruding Copper Pads;2024 IEEE 74th Electronic Components and Technology Conference (ECTC);2024-05-28

4. Scaling Cu/SiCN Wafer-to-Wafer Hybrid Bonding down to 400 nm interconnect pitch;2024 IEEE 74th Electronic Components and Technology Conference (ECTC);2024-05-28

5. 3D Partitioning with Pipeline Optimization for Low-Latency Memory Access in Many-Core SoCs;2024 IEEE International Symposium on Circuits and Systems (ISCAS);2024-05-19

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